Double View Microscope (applicable to wafers up to 4 and 6 inches in diameter)
DCM-40/60 are unique microscope systems superimposing top and bottom patterns of specimen (wafer) in the view field of microscope, then comparing shift to measure the shift length by measuring system. Since the objective lenses installed at top and bottom are 5 types, ranging from 50X to 1000X in total magnification, various specimens can be observed.
THS series is a non-contact thickness/height/depth measuring system based on an optical type focal point detection method, incorporating the two microscope optical systems of the top and bottom, with precise focus indicator using index graticule. Thickness can be measured up to 10mm with observing the surface of measuring point. Because of an optical system, operations are simple, and the precise focus indicator (Target Mark) can be seen on a monitor at a just focus condition.
Specifications
DCM-40
DCM-60
Objectives
5X,10X,20X,40X,100X
5X,10X,20X,40X,100X
Stage
50X50mm－100X100mm
150X150mm
Illumination
150W Halogen Lamp Illumination 2 sets
150W Halogen Lamp Illumination 2 sets
Specimen Thickness
Up to 20mm
Up to 30mm
Option
Photographic system,TV system
Union Optical was established in 1948 in Japan, had worked hard for offering user high quality and high-accuracy optics measuring equipment. It is affirmed to contain 3D measuring microscope, IR microscope, double view microscope and Wafer thickness measuring equipment etc in semiconductor and electronics industries.
