THS series is a non-contact thickness/height/depth measuring system based on an optical type focal point detection method, incorporating the two microscope optical systems of the top and bottom, with precise focus indicator using index graticule. Thickness can be measured up to 10mm with observing the surface of measuring point. Because of an optical system, operations are simple, and the precise focus indicator (Target Mark) can be seen on a monitor at a just focus condition.
THS-10 Manual Type
THS-20 Automatic Type
Z-axis movement of top and bottom optical systems are operated manually, and thickness measurements are performed on a monitor screen. Measurement resolution is 1μm as standard, and 0.1μm as option.
THS-20 is an automatic system combining auto focus and pulse stage.
X, Y or Z coordinate position, pitch feed, etc. by pulse motor drive are measured in sequential operation. Adopting image processing auto focus, high-reliable repeatability is achieved without individual differences. Also incorporating leading-edge technology, user-friendliness has been improved by Windows' base user interface.
(user-friendliness improved by Windows version)
Specifications
THS-10
THS-20
Measuring area
X:100mm Y:100mm
X:100mm Y:100mm
Measuring time
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6 - 8 sec/point
Resolution
1μm(0.1μm option)
0.1μm
Repeatability
-
1σ=0.5μm(testing block gauge)
Stage
Manual traveling, X,Y reading by linear scale, Min 1μm reading
Travel by pulse motor, move to coordinate position, pitch feed movement available,
4 kinds of modes available
Carrier system
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-
Detector for Orientation Flat
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Union Optical was established in 1948 in Japan, had worked hard for offering user high quality and high-accuracy optics measuring equipment. It is affirmed to contain 3D measuring microscope, IR microscope, double view microscope and Wafer thickness measuring equipment etc in semiconductor and electronics industries.
