LC 2700 series:An original slope transfer system achieves high throughput of 1950mm x 2250mm substrates, and BBS (Building Block System) offers flexible configuration and easy maintenance
Exposure system for large size glass substrate
LE0100S for 7th generation 1950mm x 2250mm glass substrates.
LE9300S for 6th generation 1500mm x 1850mm glass substrates.
LE9100S for 5th generation 1100mm x 1300mm glass substrates.
LE8000A
LE5565A
LE4000A
Wet process system for large size glass substrate to combine a cost-saving design to reduce chemical consumption 20%. With a new etching module EPD(End Point Detector) for improved reliability and performance.
LY 2700 Organic Solvent Processor for 7th generation 1950mm x 2250mm glass substrates.
LN 2700 Wet acid Processor for 7th generation 1950mm x 2250mm glass substrates.
LK 2700 Wet Alkali Processor for 7th generation 1950mm x 2250mm glass substrates.
Cleaning System
LC 2700 series:An original slope transfer system achieves high throughput of 1950mm x 2250mm substrates, and BBS (Building Block System) offers flexible configuration and easy maintenance
With the hurtling pace of technological advances here at the dawn of the twenty-first century, what is the key to staying ahead? Want an answer? Just watch the fusion of Hitachi's advanced technologies and product development capabilities with Nissei Sangyo's global sales force.
Combining the strengths of these two companies will generate synergies that create an unprecedented new force in the market-Hitachi High-Technologies Corporation.
The new company will be established on October 1, 2001 through an integration of Nissei Sangyo Co., Ltd., with Hitachi's Instruments Group and Semiconductor Manufacturing Equipment Group. Augmenting Nissei Sangyo's identity as a high-tech trading company, the new Hitachi High-Technologies will be an integrated organization that develops, manufactures, markets and services equipment and systems in the emerging field of nanotechnology. Hitachi High-Technologies will anticipate the needs of the next generation as no high-tech company ever has.
Now, for the future-Hitachi High-Technologies.